ASAHI GLASS CO., LTD : Semiconductor Processing

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Photosensitive AL-Polymer Series
High Transparent / Dry-Etch AL-Polymer

High Transparent version of AL-Polymer is a Dielectric that has high transparency and good electrical and mechanical properties. High Transparent AL-Polymer is dielectric for optical devices and wafer bonding material for MEMS devices.

·High Transparency (Transmittance=99.3%@408nm)
·Low Dielectric Constant and Loss (k=2.5-2.6)
·Low Moisture Uptake < 0.3% (@85°C/85%RH)
·Low temperature Curing (180°C~250°C)
·Dry Etch with O2 gas

[Transmittance]

[Excellent Planarization]

Cross-section(L/S=1.0um/1.0um)

[Interlayer Dielectrics of Flat Panel Displays]

[Wafer Bonding material]