Examples of New Product Development through the Integration of Core Technologies

Photomask blanks for EUV lithography (technical element: A,B,E,I,J,K)

The formation of _ne circuits pattern in cutting-edge semiconductor chips is carried out using reflective photolithography technology with extreme ultraviolet (EUV) light, which has a wavelength (13.5 nm) less than one-tenth that of conventional exposure using excimer laser light (193 nm). As a result, the precision required for photomask blanks has drastically become ten times stricter. AGC has developed this technology by combining and upgrading elemental technologies such as: high-purity glass material design technology and manufacturing process technology with uniformity and minimal thermal expansion (A, I); high-precision polishing and cleaning technology for the production of photomask blanks substrates (B, J); and optical thin _lm design technology that efficiently reflects EUV light and the coating technology to realize it (E, K).

Photomask blanks for EUV lithography

Photomask blanks for EUV lithography that enable miniaturization of semiconductor chip circuits pattern to achive larger data capacity and greatoer integration

Fluorine-based electrolyte polymers (technical element: C,D,F,G,L)

The use of hydrogen is expected to contribute to the realization of a sustainable global environment. The key material is AGC’s FORBLUE series of fluorine-based electrolyte polymers.
The FORBLUE S-SERIES of fluorine based ion-exchange membranes suitable for green hydrogen production can be used to convert renewable energy, such as solar and wind power generation, into hydrogen through water electrolysis for storage and transportation. The FORBLUE i-SERIES of electrolyte polymer solutions for fuel cells are used in electrolyte membranes and electrodes of fuel cells to efficiently generate electrical energy from hydrogen and oxygen without emitting CO2. These fluorine-based electrolyte polymers are developed and manufactured by combining AGC’s fluorine materials and polymer material technologies (C, D); electrochemical technology (F); composite technology (G); and chemical process technology (L).

Fluorine-based electrolyte polymers

Key materials for hydrogen energy utilization contributing to the realization of a sustainable global environment: Fluorine-based electrolyte polymers for water electrolysis and fuel cells